Desktop Type Gas Detector PGD-120

Model
PGD-120
Gas Detected
Semiconductor manufacturing gases, combustible gas and oxygen
Detection Principle
Electrochemical, Hot wire semiconductor, Galvanic cell
Detection Range
As per specifications
Dimensions
W164 x H210 x D220 mm

Desktop type to monitor over 20 gases by changing a plug and play gas sensor.

For continuous monitoring of small scale equipment at university and research institutes etc.

  • Easy to monitor over 20 gases simply by changing a plug and play sensor.
  • Maintenance free
  • Portable and flexible
  • NF3 monitoring is available. (model specify)

ModelPGD-120Detection Principle Electrochemical, Hot wire semiconductor,
Galvanic type Sampling Method Extractive type Detection Range As per specifications Gas Concentration
Display4-digit digital LCD display (incl. unit) Alarm Set Point2 stage alarm type (adjustable)Alarm Display Alarm lamp, Buzzer (no buzzer selectable)External OutputAnalog4-20 mA Alarm 11c voltage contact Alarm 21c voltage contact trouble alarm1c voltage contact Contact Capacity125 VAC, under 5 A Power Supply100 VAC to 220 VACDimensionsW164 x H210 x D220mmWeightApprox. 5kgOptionsBattery, Pyrolyzer for NF3

List of detectable gases

Gases Full Scale
SiH4 5/25ppm
PH3 1ppm
B2H6 500ppb
AsH3 250ppb
H2Se 250ppb
GeH4 1ppm
HF 10ppm
BCl3 25ppm (※1)
SiH2Cl2 25ppm
Si2H6 25ppm
F2 5ppm
Cl2 5ppm
HBr 10ppm
HCl 5/25ppm
CO 250ppm
ClF3 1ppm
NO2 10ppm
H2S 50ppm
O3 1ppm
BF3 10ppm (※2)
PF3 10ppm
NH3 100ppm
NF3 100ppm
H2 1000ppm
O2 25vol%

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