| Model |
PS-7 |
| Standard Type |
With a Pyrolyzer |
| Detection Principle |
Electrochemical cell,
Hot wire semiconductor,
Galvanic cell |
Pyrolysis + Electrochemical cell |
| Sampling Method |
Extractive type (Sample flow rate: 0.5L/min, automatic control) |
| Sampling Tubing*1 |
Teflon – External diameter: 6mm, Internal diameter: 4mm, Tubing length: 20m or less |
| Gas Concentration
Indication |
4-digit LCD (with measuring unit), 20 – step bar graph |
| Alarm Indication |
Gas alarm (1st and 2nd stage)
– Alarm: Red LED lamp flashing
LCD – ALARM1 for 1st stage, ALARM1 and ALARM2 for 2nd stage
Low flow alarm
– Clogging indication: LCD – Flow sign rotates slowly
– Alarm: Yellow LED lamp flashing
LCD – FLOW indication, Flow sign stops rotating
Sensor trouble alarm/Incorrect sensor insertion alarm
– Alarm: Yellow LED lamp flashing
LCD – SENS. indication
Pyrolyzer wire break alarm*2
– Alarm: Yellow LED lamp flashing
LCD – CONV. indication |
| Eternal Output |
– Gas concentration analog output: 4-20 mADC (shared with the power source
negative terminal)
– Gas alarm contact (1st and 2nd stage): 1a no-voltage contact/Non-latching
– Trouble alarm contact (Open collector/Non-latching) |
| Application Cable |
3C or 4C shielded control cable (φ8-11mm) x 2 |
| Operating Temperature
/ Humidity |
0 to 40 °C (No sudden change)
30 to 85 %RH (No condensation) |
| Power Source |
24 VDC ±10% |
| Power Consumption |
Approx. 7W |
| Dimensions |
W62 X H124 X D143 mm (excluding options and protrusions) |
| Weight |
Approx. 1.0kg |
| Installation |
Wall mount |
| Approval |
CE, SEMI (Semiconductor Equipment and Material Standard) |
*1 Teflon is recommended. But it depends on operating conditions when the gas adsorption capacity is high, so contact us for more information. The specifications above are subject to change without prior notice.
*2 Only for the model with a pyrolyzer.
List of detectable gases (sensor unit)
|
Gases
|
Full Scale
|
Detection Principle
|
Model No. |
|
SiH4
|
5 / 25ppm
|
Electrochemical
|
CDS-7
|
|
PH3
|
1ppm
|
|
B2H6
|
500ppb
|
|
AsH3
|
250ppb
|
|
H2Se
|
250ppb
|
|
Si2H6
|
25ppm
|
|
SiH2Cl2
|
25ppm
|
|
GeH4
|
1ppm
|
|
NH3
|
100ppm
|
|
HF
|
10ppm
|
|
PF3
|
10ppm
|
|
HCl
|
5 / 25ppm
|
|
HBr
|
10ppm
|
|
F2
|
5ppm
|
|
Cl2
|
5ppm
|
|
ClF3
|
1ppm
|
|
O3
|
1ppm
|
|
CO
|
250ppm
|
|
H2S
|
50ppm
|
|
NF3
|
100ppm
|
Electrochemical
with pyrilyzer
|
|
CCl4
|
100ppm
|
|
H2
|
500 / 1000ppm
|
Hot wire semiconductor
|
CHS-7
|
|
O2
|
25vol%
|
Galvanic cell
|
COS-7
|
*Please contact your representative for gases other than those listed.
Approvals
*Some types are excluded. Please contact us for farther information.
SEMI (Semiconductor Equipment and Material Standard)
Connectable Alarm Units
