Model |
SDE-703DIII |
Gas Detected |
Hydrogen, Arsine, Diborane, Silane and Phosphine |
Detection Principle |
Hot wire semiconductor sensor |
Sampling Method |
Extractive |
Detectable Leak
Rate |
H2: 5.07 x 10-7, AsH3: 2.53 x 10-7, B2H6: 1.01 x 10-7, SiH4: 2.53 x 10-7,
PH3: 1.52 x 10-7 |
Detectable Gas
Concentration |
H2: 1.0ppm, AsH3: 0.5ppm, B2H6: 0.2ppm, SiH4: 0.5ppm, PH3: 0.3ppm |
Response Time |
Within 10 seconds (for 300% of detectable gas concentration) |
Power Supply |
Size AA alkaline batteries x 2 |
Battery Life*1 |
Approx. 12 hours
(with size AA alkaline batteries) |
Degree of Protection |
Equivalent to IP22 |
Operating Pressure |
Atmospheric pressure (800 to 1100 hPa) |
Operating
Temperature/Humidity |
0 to +40°C
Less than 85%RH (with no condensation) |
Dimensions |
Approx. W38 x H130 x D32 mm (excluding protrusions) |
Weight |
Approx. 190g (including batteries and soft case) |
Accessories |
Soft case, Drain Filter, Replacement Filter, Gas Probe, Dust Filter, Hand Strap,
Size AA Alkaline Battery x 2, etc. |
*1 It may vary based on the environmental conditions, operating conditions, strage time, battery manufacturer, etc.
arsine【AsH3】, dichlorosilane【SiH2Cl2】, diborane【B2H6】, hydrogen【H2】, semiconductor manufacturing gases, phosphine【PH3】, R407C, R410A