For gas leak inspection and concentration measurement at semiconductor factory where there is toxic gas.
- World’s Smallest Portable Gas Detector for NF3 Detection. NF3 can be detected without any optional equipment.
- The calibrated gas sensor unit can be replaced on site, reducing maintenance work.
- Large LCD
- 2-way power supply : Dry batteries and AC power supply (optional)
- Small and lightweight
- The speed of alarm sound changes depending on gas concentration.
Detection Principle |
Electrochemical, Electrochemical + pyrolyzer |
Target Gas |
Semiconductor gases |
Sampling Method |
Extractive |
Measuring Range |
As per delivery specifications |
Accuracy *1 |
±10%F.S. except for XDS-7NF
-30%F.S. to +10%F.S. for XDS-7NF |
Response time *1 |
T60: Less than 60 seconds |
Display |
Four-digit on LCD |
Power Source |
Alkaline AA battery x 4pcs or Dedicated 100-240VAC/6VDC adapter (optional) *3 |
Continuous Operating Time*2 |
More than 12 hours except for XDS-7NF
More than 8 hours for XDS-7NF
(by alkaline AA batteries (Toshiba LR6AN) at 20℃, with no gas alarm) |
Operating Temperature and Humidity |
0 to +40ºC, 30 to 85%RH |
Compliance |
CE (EMC: 2014/30/EU) *3 *4 |
Dimensions |
Approx. W62 × H150 × D128 mm (excluding protrusions) |
Mass |
Approx. 1.3 kg |
*1. Under identical conditions.
*2. The operating time (battery life) may vary depending on environment and conditions of use, storage period, battery manufacturer etc.
*3. AC power adapter does not comply with CE marking.
*4. There are two types of EC-7 sensor stocker, global and domestic (for use in Japan). Global type is CE-marked.
ammonia【NH3】,silane【SiH4】,dichlorosilane【SiH2Cl2】, arsine【AsH3】,phosphine【PH3】,diborane【B2H6】,hydrogen selenide【H2Se】,germane【GeH4】,chlorine【Cl2】,chlorine trifluoride【ClF3】,hydrogen chloride【HCI】,hydrofluoric fluoride【HF】,hydrogen bromide【HBr】,nitrogen monoxide【NO】,hydrogen sulfide【H2S】,carbon monoxide【CO】,disilane【Si2H6】,fluorine【F2】,ozone【O3】,nitrogen trifloride【NO3】